Mask Aligner - OAI Model 204IR

Mask Aligner - OAI Model 204IR 

This manual mask aligner is capable of frontside alignment and backside alignment (using transmitted IR light).

The aligner has soft contact, hard contact, and vacuum contact modes.

The tool has a 350 Watt I-line Near UV lamp calibrated to 20 mW/cm^2 intensity at I-line (365 nm).

The two alignment microscopes have a minimum separation of 48 mm, and a field of view of approximately 300 microns. Alignment accuracies on the order of 1-2 microns are possible for frontside alignment.

Download the Mask Aligner - OAI Model 204IR Brochure (PDF version, 2,122 KB)

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