This manual mask aligner is capable of frontside alignment and backside alignment (using transmitted IR light).
The aligner has soft contact, hard contact, and vacuum contact modes.
The tool has a 350 Watt I-line Near UV lamp calibrated to 20 mW/cm^2 intensity at I-line (365 nm).
The two alignment microscopes have a minimum separation of 48 mm, and a field of view of approximately 300 microns. Alignment accuracies on the order of 1-2 microns are possible for frontside alignment.
Download the Mask Aligner - OAI Model 204IR Brochure (PDF version, 2,122 KB)